@proceeding{doi: 10.1117/12.240959,
author = { John Joseph Helmsen,Elbridge Gerry Puckett,Phillip  Colella,Milo  Dorr},
title = {Two new methods for simulating photolithography development in 3D},
journal = {Proc.SPIE},
volume = {2726},
number = {},
pages = {2726 - 2726 - 9},
year = {1996},
doi = {10.1117/12.240959},
URL = {https://doi.org/10.1117/12.240959},
eprint = {}
}